System for monitoring environment and monitoring method based on system for monitoring environment

ABSTRACT

Embodiments provide a system for monitoring an environment and a monitoring method based on a system for monitoring an environment. The system for monitoring the environment includes: a sampling device, configured to collect environmental samples from the process areas and including a system sampling pipeline, the environmental sample containing air; an analysis device, connected to an output end of the system sampling pipeline and configured to analyze the collected environmental samples; and an air supply device, connected to the system sampling pipeline and configured to provide a purge gas and purge the system sampling pipeline using the purge gas. In a period for a single sampling, a ratio between a time period for purging the system sampling pipeline using the air supply device and a time period for sampling by the sampling device is controlled to be 1:5.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a U.S. continuation application of InternationalApplication No. PCT/CN2021/105332, filed on Jul. 8, 2021, which claimspriority to Chinese Patent Application No. 202010973476.9, filed on Sep.16, 2020. International Application No. PCT/CN2021/105332 and ChinesePatent Application No. 202010973476.9 are incorporated herein byreference in their entireties.

TECHNICAL FIELD

The disclosure relates to the field of semiconductors, and inparticular, to a system for monitoring an environment and a monitoringmethod based on a system for monitoring an environment.

BACKGROUND

With the increase in the complexity of the semiconductor industryprocess and the miniaturization of feature sizes of products, the impactof the stability of gas environment in process areas on the products hasbecome a key concern for environmental control of a clean room.

SUMMARY

To resolve the problem above, embodiments of the disclosure provide amonitoring method based on a system for monitoring an environment, usedfor monitoring concentrations of airborne contaminants in a plurality ofprocess areas in a clean room. The method is characterized by thefollowing. The system for monitoring an environment includes: a samplingdevice, configured to collect environmental samples of the process areasand including a system sampling pipeline, the environmental sampleincluding air; an analysis device, connected to an output end of thesystem sampling pipeline and configured to analyze the collectedenvironmental samples; and an air supply device, connected to the systemsampling pipeline and configured to provide a purge gas and purge thesystem sampling pipeline using the purge gas. In a period for a singlesampling, a ratio between the time period for purging the systemsampling pipeline by using the air supply device and the time period forsampling by using the sampling device is controlled to be 1:5.

The embodiments of the disclosure further provide a system formonitoring an environment, used for monitoring concentrations ofairborne contaminants in a plurality of process areas in a clean room.The system includes an air supply device, a sampling device, an analysisdevice, and a control device.

The air supply device is connected to a system sampling pipeline andconfigured to provide a purge gas and purge the system sampling pipelineby using the purge gas.

The sampling device includes the system sampling pipeline and isconfigured to collect environmental samples of the process areas. Theenvironmental samples include air.

The analysis device is connected to an output end of the system samplingpipeline and configured to analyze the collected environmental samples.

The control device is configured to control, in a period for a singlesampling, a ratio between the time period for purging the systemsampling pipeline by using the air supply device and the time period forsampling by using the sampling device to be 1:5.

BRIEF DESCRIPTION OF THE DRAWINGS

One or more embodiments are exemplified by figures in the correspondingdrawings. These exemplified descriptions do not constitute a limitationon the embodiments. Elements with the same reference numerals in thedrawings are denoted as similar elements. Unless otherwise stated, thefigures in the drawings do not constitute a scale limitation.

FIG. 1 schematically shows a structure of a system for monitoring anenvironment provided by an embodiment of the disclosure.

FIG. 2 schematically shows a localized structure of a system formonitoring an environment provided by an embodiment of the disclosure.

FIG. 3 schematically shows a monitoring method based on a system formonitoring an environment provided by an embodiment of the disclosure.

FIG. 4 schematically shows a localized structure of a system formonitoring an environment provided by an embodiment of the disclosure;and

FIG. 5 schematically shows another system for monitoring an environmentprovided by an embodiment of the disclosure.

DETAILED DESCRIPTION

To make the objectives, technical solutions, and advantages ofembodiments of the disclosure clearer, the embodiments of the disclosureare described below in detail with reference to the accompanyingdrawings. However, it should be understood for persons of ordinary skillin the art that, in each embodiment of the disclosure, many technicaldetails are proposed for a reader to better understand the disclosure.However, the technical solutions claimed by the disclosure can berealized, even without these technical details and various changes andmodifications based on the following embodiments.

In related technologies, the ratio between the time period for cleaningthe sampling pipeline and the time period for sampling by using thesampling device in system for monitoring an environment is not fixed.The time period of sampling cycle is different each time. Thecomposition of the gas in the process areas is different, after eachsampling cycle, causing the problem of unstable gas environment in theprocess areas, which in turn affects the product yield. To resolve theproblem, the embodiments of the disclosure provide a system formonitoring an environment and a monitoring method based on a system formonitoring an environment.

FIG. 1 schematically shows a structure of a system for monitoring anenvironment provided by an embodiment of the disclosure.

Referring to FIG. 1, a monitoring method based on a system formonitoring an environment, used for monitoring concentrations ofairborne contaminants in the process areas 10 in a clean room isprovided. The clean room has a plurality of process areas 10. The systemfor monitoring the environment includes a sampling device (not shown),an analysis device 12, and an air supply device 13. The sampling deviceis configured to collect environmental samples of the process areas 10and includes a system sampling pipeline 114. The environmental samplesinclude air. The analysis device 12 is connected to an output end of thesystem sampling pipeline 114 and configured to analyze the collectedenvironmental samples. The air supply device 13 is connected to thesystem sampling pipeline 114 and configured to provide a purge gas andpurge the system sampling pipeline 114 by using the purge gas. In aperiod for a single sampling, a ratio between the time period forpurging the system sampling pipeline 114 by using the air supply device13 and the time period for sampling by using the sampling device iscontrolled to be 1:5.

In this embodiment, the sampling device includes a sampling pump 111,located between the system sampling pipeline 114 and the analysis device12. During sampling, the sampling pump 111 is operated to collect theenvironmental samples from the process areas 10 and transmit thecollected environmental samples to the analysis device 12.

In some examples, the environment monitoring system further includes acontrol device, configured to control the ratio between the time periodfor purging the system sampling pipeline by using the air supply deviceand the time period for sampling by the using sampling device to be 1:5.The control system is further configured to control the operation of thesampling pump during the sampling.

In another example, the sampling device further includes a buffer box(not shown). The buffer box is used for pre-mixing and stabling theenvironmental samples collected by the sampling pump 111, to ensure thatthe air pressure of the environmental samples for analysis is within apreset range, avoiding a pressure fluctuation caused by intermittentsampling of the sampling pump 111, preventing data analysis of theanalysis device 12 from being affected by the pressure fluctuation, andensuring the accuracy of concentration data of airborne contaminantsobtained by the analysis device 12.

Data analysis can be performed by the analysis device 12 when thepressure in the buffer box is within the preset range. The buffer boxmay perform a pressure calculation function. In addition, the buffer boxmay have a pressure relief port, which is used to relieve part of thepressure when there is no time for data analysis due to sudden increasein the internal pressure of the buffer box, to ensure that theconcentration data obtained by the analysis has higher accuracy.

In this embodiment, the sampling pump 111 may be in type of a diaphragmpump. A gas transport pipeline is separated from a plunger through adiaphragm, so as to prevent contaminants on a surface of the plungerfrom contaminating the transported gas, thereby ensuring the accuracy ofthe data about the concentration obtained by the analysis device 12.

In one example, the analysis device 12 is further configured to analyzethe gas purged from the system sampling pipeline 114 to the analysisdevice 12. The analysis device 12 includes a plurality of analysismodules. Each of the analysis modules is configured to analyze theconcentration of the corresponding airborne contaminant. The pluralityof analysis modules can simultaneously analyze the environmental samplescollected by the sampling device. In this way, concentrations ofdifferent types of airborne contaminants can be obtained at the sametime without sequential analysis, which facilitates shortening theoverall analysis time for the concentrations of airborne contaminants Inaddition, the sampling frequency of the environmental samples can bereduced, and thus the monitoring time for the concentrations of airbornecontaminants, can be further shortened, thereby facilitating the rapidmonitoring and rapid treatment for the concentrations of the airbornecontaminants.

In another example, the analysis device 12 includes an acid analysismodule, an ammonia analysis module, a sulfur analysis module, and anorganic substance analysis module, which are respectively configured tomonitor the concentration of an acidic gas, the concentration ofammonia, the concentration of a sulfur dioxide, and the concentration ofan organic substance in the process areas 10, to prevent acidic gas andammonia from affecting the formation of metal wires, prevent saltsproduced by the reaction of acid gas and ammonia from affecting theproduct yield, and prevent sulfur dioxide from combining with ammonia tocause atomization on a surface of a photomask, thereby avoiding thereduction in the product yield and the increase in rework rate caused bythe atomization.

In other embodiments, the analysis device may further include ananalysis module for other airborne contaminants. It should be noted thatany gas that may affect the process or product yield may be regarded asan airborne contaminant, and the types of airborne contaminants may bedifferent in different process areas.

In this embodiment, referring to FIG. 1, the sampling device furtherincludes a plurality of single sampling pipelines 113. Each of theprocess areas 10 is connected to a single sampling pipeline 113. Thesingle sampling pipelines 113 connected to different process areas 10are different. The system sampling pipeline 114 can be connected toanyone of the single sampling pipelines 113. An output end of the systemsampling pipeline 114 is connected to the analysis device 12. Thesampling device further includes a sampling valve 115, configured toconnect or disconnect the single sampling pipelines 113 and the systemsampling pipeline 114.

A positional relationship among the single sampling pipelines 113, thesystem sampling pipeline 114, and the sampling valve 115 is shown,referring to FIG. 2. The system sampling pipeline 114 is a continuouschannel. On an extension path of the system sampling pipeline 114, thesystem sampling pipeline 114 may be connected to each of the singlesampling pipelines 113 through the sampling valve 115. When theconnection of the single sampling pipelines 113 and the system samplingpipeline 114 is disconnected by the sampling valve 115, the gas in theprocess areas 10 can only enter the single sampling pipelines 113, andcannot reach the system sampling pipeline 114. When the sampling valve115 connects the single sampling pipelines 113 and the system samplingpipeline 114, the gas in the process areas 10 can reach the systemsampling pipeline 114 through the single sampling pipelines 113.

The monitoring method of this embodiment further includes the followingoperations. When sampling, the sampling valve 115 is controlled toconnect one of the single sampling pipelines 113 corresponding to one ofthe target process areas to the system sampling pipeline 114, anddisconnect the other single sampling pipelines 113 from the systemsampling pipeline 114. The environmental sample collected from thetarget process area is analyzed by the analysis device 12.

It should be noted that at a same moment, a plurality of sampling valves115 may be in a state of connecting the single sampling pipelines 113and the system sampling pipeline 114. That is, the analysis device 12can be configured to analyze the concentration of the airbornecontaminant in one process area 10, and can also be configured toanalyze an average concentration of the airborne contaminants in theplurality of process areas 10.

Referring to FIG. 1, the plurality of sampling valves 115 are fixed on avalve disc 16 a.

Since the system sampling pipeline 114 is shared, in order to avoidresidual airborne contaminants in the previous sampling process fromaffecting a next sampling, it is necessary to clean the system samplingpipeline 114 between two collections. The sampling valve 115 can bedisposed at one end of the single sampling pipeline 113 towards thesystem sampling pipeline 114, in order to being unable to be effectivelyremoved due to the accumulation of airborne contaminants in the singlesampling pipeline 113 during the cleaning process. In this way, it isensured that the single sampling pipeline 113 has a higher cleanliness,and the sampling valve 115 can be cleaned to a certain extent.

In this embodiment, the air supply device 13 is connected to the systemsampling pipeline 114. The air supply device 13 is configured to providea purge gas, purge the system sampling pipeline 114 using the purge gas,and send the purged gas to the analysis device 12. In this way, when theenvironment of the system sampling pipeline 114 is confirmed to satisfythe sampling requirements by using the analysis device 12, the airsupply device 13 is controlled by using the control device to stoppurging, and thus the next sampling is performed. In this way, it isensured that the environment of the system sampling pipeline 114 duringthe next sampling satisfies the preset requirements, so as to preventthe environment of the system sampling pipeline 114 from interfering theanalysis of the airborne contaminant concentration in the process areas10, and to ensure the accuracy of detection results.

It should be noted that the purging of the system sampling pipeline 114by using the air supply device 13 may also affect the adsorption of aninner wall of the system sampling pipeline 114. Specifically, the longerthe purging time is, the cleaner the inner wall of the system samplingpipeline 114 is, the greater the adsorption capacity of the inner wallto the airborne contaminants is, and the lower the detection value ofairborne contaminants is. Accordingly, the shorter the purging time is,the dirtier the inner wall of the system sampling pipeline 114 is. Theairborne contaminants on the inner wall of the system sampling pipeline114 may affect the detection results, resulting in the higher detectionvalue of airborne contaminants. That is, when cleaning the systemsampling pipeline 114, the cleaning time needs to be controlled, so thatthe inner wall of the system sampling pipeline 114 is at a preset cleanlevel.

In this embodiment, the environment monitoring system further includes acontrol device (not shown), configured to control the sampling device tocollect environmental samples from preset process areas 10. The controldevice is further configured to control a valve state of the samplingvalve 115. That is, the switching of objects collected from the processareas 10 is realized, by controlling the valve state of the samplingvalve 115 through the control device, so as to obtain the data about theconcentrations of airborne contaminants of the specific process areas10.

In this embodiment, the control device is further configured to set aconcentration threshold for at least one process area 10. The system formonitoring an environment further includes a warning device (not shown),configured to send, responsive to a concentration threshold of anyprocess area 10 exceeding a preset concentration threshold of theprocess area 10, warning information. In this way, it is beneficial toquickly clean the specific process areas where airborne contaminantsexceed the standard.

Referring to FIG. 3, in this embodiment, in the period for the singlesampling, the ratio between the time period for purging the systemsampling pipeline 114 by using the air supply device 13 and the timeperiod for sampling by using the sampling device is controlled to be1:5, and thus the ratio between the time period for purging the systemsampling pipeline 114 by using the air supply device 13 and the timeperiod for sampling by using the sampling device is kept the same ineach sampling cycle. Therefore, in each sampling cycle, the systemsampling pipeline 114 has the same cleanliness, and the degree ofsampling gases of the process areas 10 is also the same. Thus, therewould be no analysis error caused by the different sampling cycles inthe analysis on the components of ambient gas in the process areas 10,which ensures that there is only a small change in the composition ofambient gas in process areas 10 after each sampling cycle, improving thestability of the ambient gas in the process areas 10.

It should be noted that, in this embodiment, in order to save atime-cost of the entire sampling cycle process and to ensure that theinner wall of the system sampling pipeline 114 is at a preset cleanlevel, in the period for a single sampling, the time period for purgingthe system sampling pipeline 114 by using the air supply device 13 maybe controlled in a range from 10 minutes to 15 minutes, specifically, 12minutes, 13 minutes, or 14 minutes, and the time period for sampling byusing the sampling device may be controlled in a range from 50 minutesto 75 minutes, specifically 55 minutes, 60 minutes, or 65 minutes.

Referring to FIG. 1, in this embodiment, the system for monitoring anenvironment further includes a cleaning pipeline 16 and an air inletpipeline 17. A first end of the cleaning pipeline 16 is configured tointroduce a Clean Dry Air (CDA) and a second end of the cleaningpipeline 16 is connected to the single sampling pipeline 113. Thesampling valve 115 is configured to control the single sampling pipeline113 to connect to the system sampling pipeline 114 or the cleaningpipeline 16. One end of the air inlet pipeline 17 is connected to thefirst end of the cleaning pipeline 16, and the other end of the airinlet pipeline 17 is configured to introduce the CDA.

In one example, referring to FIG. 2, when the single sampling pipeline113 is connected to the cleaning pipeline 16 (not shown), the samplingvalve 115 is used for disconnecting the single sampling pipelines 113from the system sampling pipeline 114, so that the gas in the systemsampling pipeline 114 cannot enter the single sampling pipelines 113 orthe corresponding process area 10. In this case, the single samplingpipeline 113 can be cleaned through the cleaning pipeline 16. In thisway, it can be ensured that the single sampling pipeline 113 has ahigher cleanliness, thereby preventing the airborne contaminants in thesingle sampling pipeline 113 from causing interference to analysisresults on the concentrations of airborne contaminants in the processareas 10.

Referring to FIG. 3, in this embodiment, the monitoring method includesthe following operations. In the period for the single sampling, theratio between the time period for introducing the CDA through the airinlet pipeline 17 to the time period for sampling by using the samplingdevice is controlled to be 1:5. In some examples, the control device isfurther configured to control, in the period for the single sampling,the ratio between the time period for introducing the CDA through theair inlet pipeline and the time period for sampling by using thesampling device to be 1:5. In this way, in each sampling cycle, thesingle sampling pipelines 113 have the same cleanliness, and the degreeof sampling gases of the process areas 10 is also the same. Thus, therewould be no analysis error caused by the different sampling cycles inthe analysis on the components of ambient gas in the process areas 10,which ensures that there is only a small change in the composition ofambient gas in process areas 10 after each sampling cycle, improving thestability of the ambient gas in the process areas 10.

Referring to FIG. 3, in one example, the monitoring method furtherincludes the following operations. In the period for a single sampling,the purging of the system sampling pipeline 114 by the air supply device13 and the introducing of the CDA through the air inlet pipeline 17 arecontrolled to start and stop at the same time. In some examples, thecontrol device is further configured to control, in the period for asingle sampling, the purging of the system sampling pipeline and theintroducing of the CDA through the air inlet pipeline to start and stopat the same time. In this way, in each sampling cycle, the air supplydevice 13 cleaning the system sampling pipeline 114 and the CDA cleaningthe single sampling pipeline 113 are started at the same time, and lastfor the same period. The ratio between the time period for cleaning thewhole system for monitoring the environment and the time period forsampling by using the sampling device is 1:5, which does not change theratio between the time period for cleaning the system and the timeperiod for sampling due to a plurality of cleaning pipelines, furtherensuring the stability of the gas environment in the process areas 10.

In the sampling process of a process area 10, because the systemsampling pipeline 114 is in contact with each sampling valve 115,airborne contaminants may be deposited on a surface of each samplingvalve 115 exposed by the system sampling pipeline 114. At the same time,since molecules of the airborne contaminants are small and prone todrift, a small amount of airborne contaminants may be transferred toother positions of the sampling valve. Before performing the sampling inthis process area 10 again, it is necessary to purge the system samplingpipeline 114 using the air supply device 13, to remove the airbornecontaminants left in the system sampling pipeline 114 when the previousprocess area 10 is sampled, avoiding the airborne contaminants in thesystem sampling pipeline 114 from affecting the analysis result of theanalysis device 12. In addition, since a small amount of airbornecontaminants cannot be purged and removed by the air supply device 13,the CDA can be introduced for back-blowing, so as to perform furthercleaning on the single sampling valve 115 corresponding to the processarea 10 sampled for the second time. Since there are fewer residualairborne contaminants, the back-blowing has less influence on theanalysis results.

It should be noted that, since the gas used by the air supply device 13for purging is finally introduced to the buffer box, inert gas ornitrogen may be used for purging. In addition, since the gas during theback-blowing is finally introduced to the process area 10 of the cleanroom, and there may be a staff in the clean room, breathable dry air maybe used, to ensure the life safety of the staff.

In this embodiment, the system for monitoring an environment furtherincludes a humidification device 14, configured to provide a water mist.The humidification device 14 is connected between the air supply device13 and the system sampling pipeline 114. The water mist is generated bythe humidification device 14, so that the purge gas and the water mistare mixed and then enter the system sampling pipeline 114. In this way,after the purge gas provided by the air supply device 13 is humidifiedby the water mist provided by the humidification device 14, the purgegas contains the water mist. Because some residual contaminants in thesystem sampling pipeline 114 are soluble in water, the residualcontaminants in the system sampling pipeline 114 can be removed quickly.Therefore, the cleaning time is shortened, increasing the samplingfrequency. Moreover, after one sampling and prior to next sampling, theresidual contaminants in the system sampling pipeline 114 can be morethoroughly removed by the humidification device 14, to ensure that eachsampling would not be interfered by the airborne contaminants in theprocess area from the sampling prior to it, which facilitates ensuringthat the data about the airborne contaminants in the process areaobtained from each sampling analysis have higher accuracy.

In the embodiments of the present disclosure, the humidification device14 is also connected between the air inlet pipeline 17 and the cleaningpipeline 16, so that the CDA and the water mist are mixed to clean thesampling valve 115 and the single sampling pipeline 113. In this way,the air inlet pipeline 17 contains the water mist humidified CDA, whichcan clean the single sampling pipeline 113 through the cleaning pipeline16. Because some residual contaminants in the single sampling pipeline113 are soluble in water, the residual contaminants in the singlesampling pipeline 113 can be removed quickly. Therefore, the cleaningtime is shortened, and the sampling frequency is increased.

The residual contaminants in the pipelines may be ammonia.

Referring to FIG. 4, in this embodiment, the humidification device 14includes a humidification pipeline 14 a, a water storage tank 14 e, andan oscillator 14 i. The humidification pipeline 14 a is connectedbetween the system sampling pipeline 114 and the air supply device 13(not shown). The purge gas and the water mist are controlled to be mixedand then transmitted to the system sampling pipeline 114 via thehumidification pipeline 14 a. The water storage tank 14 e includes awater storage area 14 f and a gas circulation area 14 g connected to thewater storage area 14 f. The humidification pipeline 14 a is connectedto the gas circulation area 14 g. The oscillator 14 i is located in thewater storage area 14 f and configured to oscillate water in the waterstorage area 14 f to generate the water mist.

In some examples, the control device is further configured to controlthe purge gas and the water mist to be mixed and then transmitted to thesystem sampling pipeline via the humidification pipeline.

In one example, referring to FIG. 4, the humidification device 14further includes a drying pipeline 14 b and a switch valve 14 c. Thedrying pipeline 14 b is independent of the humidification pipeline 14 a.The drying pipeline 14 b is connected between the air supply device 13(not shown) and the system sampling pipeline 114. The drying pipeline 14b is configured to transmit the purge gas to the system samplingpipeline 114. The switch valve 14 c is configured to switch one of thehumidification pipeline 14 a and the drying pipeline 14 b to beconnected to the system sampling pipeline 114, and the other one of thehumidification pipeline 14 a and the drying pipeline 14 b to bedisconnected from the system sampling pipeline 114. In this way, thehumidification device 14 can be reasonably adjusted and adopt differentpipelines according to different situations. When the system samplingpipeline 114 contains residual airborne contaminants that are soluble inwater, the humidification pipeline 14 a is adopted. When the systemsampling pipeline 114 does not contain residual airborne contaminantsthat are soluble in water, the drying pipeline 14 b is adopted.

The switch valve 14 c may be a solenoid valve.

In another example, referring to FIG. 4, the humidification device 14further includes a timing module 14 d. The timing module 14 d isconfigured to set the time period for the connection between thehumidification pipeline 14 a and the system sampling pipeline 114. Thetiming module 14 d is further configured to set the time period for theconnection between the drying pipeline 14 b and the system samplingpipeline 114.

Referring to FIG. 1 and FIG. 4, in this embodiment, the system formonitoring an environment further includes a first processing module 15,configured to control, based on the analysis results of the analysisdevice 12, the switch valve 14 c to switch one of the drying pipeline 14b and the humidification pipeline 14 a to be connected to the systemsampling pipeline 114, and the other one of the drying pipeline 14 b andthe humidification pipeline 14 a to be disconnected from the systemsampling pipeline 114. When the air supply device 13 purges the gas inthe system sampling pipeline 114 to the analysis device 12 through thedrying pipeline 14 b of the humidification device 14, and the analysisdevice 12 analyzes that the gas contains airborne contaminants that aremore soluble in water, the switch valve 14 c is controlled by the firstprocessing module 15 to switch the drying pipeline 14 b to thehumidification pipeline 14 a, so as to continue purging the systemsampling pipeline 114. In this way, when the system sampling pipeline114, upon the analyzing of the analysis device 12, contains airbornecontaminants that are more soluble in water, the drying pipeline 14 b ofthe humidification device 14 is switched to the humidification pipeline14 a, so as to quickly remove the airborne contaminants in the systemsampling pipeline 114 and shorten the cleaning time, thereby increasingthe sampling frequency.

In summary, the humidification device 14 being connected to the systemsampling pipeline 114 using the humidification pipeline 14 a or thedrying pipeline 14 b can be switched by the timing module 14 d or thefirst processing module 15.

Referring to FIG. 4, in this embodiment, the water storage tank 14 efurther includes a mesh structure 14 h, a water injection port (notshown), and a liquid level detection sensor (not shown). The waterstorage area 14 f is connected to the gas circulation area 14 g throughthe mesh structure 14 h. The mesh structure 14 h may be a metal mesh.The water injection port is used for connecting the water storage area14 f to an external water supply pipeline. When a water level of thewater storage tank 14 e is detected lower than a warning water level bythe liquid level detection sensor, the external water supply pipelineinjects water into the water storage tank 14 e through the waterinjection port.

In this embodiment, the humidification device 14 further includes acirculating pump 14 j connected to the water storage tank 14 e andconfigured to maintain the continuous flow of water in the water storagetank 14 e and prevent bacteria breeding.

In this embodiment, the system for monitoring an environment furtherincludes a humidity sensor and a second processing module. The humiditysensor is disposed at a port of the system sampling pipeline 114 facingthe humidification device 14 and configured to detect a humidity of thepurge gas in the system sampling humidification 114. The secondprocessing module is used for displaying, according to a humiditydisplayed by the humidity sensor, an amount of the water mist providedby the humidification device 14.

Referring to FIG. 4, in one example, the humidity sensor 14 k and thesecond processing module 14L can be disposed in the humidificationdevice 14. The humidity sensor 14 k is disposed at a port of a pipelineof the humidification device 14 facing the system sampling pipeline 114.

Referring to FIG. 5, in another example, the system for monitoring anenvironment further includes a gas exchange valve 171, an air outletpipeline 172, and a cleaning pump 173. The gas exchange valve 171 isconfigured to control one end of the cleaning pipeline 16 to connect toone end of the air inlet pipeline 17. The other end of the air outletpipeline 172 is configured to introduce the CDA. Alternatively, the gasexchange valve 171 is configured to control one end of the cleaningpipeline 16 to connect to one end of the air outlet pipeline 172. Theother end of the air outlet pipeline 172 is connected to the cleaningpump 173. The cleaning pump 173 is configured to pump air.

When a process area 10 is sampled, single sampling pipelines 113corresponding to other process areas 10 can be connected to the cleaningpipeline 16, and one end of the cleaning pipeline 16 is connected to theair outlet pipeline 172. A gas in the single sampling pipeline 113 isthe same as an ambient gas in the corresponding process area 10 throughpumping by the cleaning pump 173, facilitating the next sampling. Thegas in the single sampling pipeline 113 is kept in a flow state throughpumping by the cleaning pump 173, avoiding the airborne contaminants inthe single sampling pipeline 113 from being adsorbed on the inner wallof the single sampling pipeline 113 due to the gas in a static state,and ensuring that the single sampling pipeline 113 has a higher degreeof cleanliness, which is beneficial to improve the accuracy of thedetection results.

Compared with back-blowing cleaning, different airborne contaminants inthe process areas 10 may be removed proportionally or non-proportionallyby air-pumping cleaning, which causes an inaccurate detection results.Specifically, when the ratio of the removed airborne contaminants to thetotal airborne contaminants is different from the ratio of the removedcarrier gas (gases other than the airborne contaminants) to the totalcarrier gas, the concentration of airborne contaminants in the processarea 10 may be increased or reduced. When the ratio of different typesof removed airborne contaminants to the total amount of airbornecontaminants is different, the contrast relationship of theconcentration of different types of airborne contaminants in the processarea 10 may change.

Since the total amount of CDA introduced during back-blowing can becalculated, the back-blowing cleaning solution can eliminate theinfluence of CDA on the analysis of airborne contaminant concentrationthrough calculation, thereby accurately obtaining the analysis resultsof airborne contaminants. The analysis results include the types ofairborne contaminants, the concentrations of airborne contaminants, andthe concentration ratio of different airborne contaminants.

In this embodiment, in the period for a single sampling, the ratiobetween the time period for purging the system sampling pipeline byusing the air supply device and the time period for sampling by usingthe sampling device is controlled to be 1:5. In addition, the cleaningof the system sampling pipeline 114 by the air supply device 13 and thecleaning of the single sampling pipelines by the CDA are started at thesame time, and last for the same period. Therefore, the ratio betweenthe time period for cleaning the system and the time period for samplingby using the sampling device is the same. In this way, in each samplingcycle, the single sampling pipelines have the same cleanliness, and thedegree of sampling gases of the process areas is also the same. Thus,there would be no analysis error caused by the different sampling cyclesin the analysis on the components of ambient gas in the process areas,which ensures that there is only a small change in the composition ofambient gas in process areas after each sampling cycle, improving thestability of the ambient gas in the process areas.

Persons of ordinary skill in the art can understand that the foregoingembodiments are exemplary embodiments for realizing the disclosure. Inpractical applications, various changes can be made in form and details,without departing from the spirit and the scope of the embodiments ofthe disclosure. Any person skilled in the art can make various changesand modifications without departing from the spirit and the scope of theembodiments of the disclosure. Therefore, the protection scope of theembodiments of the disclosure should be subject to the scope defined bythe claims.

1. A monitoring method based on a system for monitoring an environment,used for monitoring concentrations of airborne contaminants in aplurality of process areas in a clean room, the system for monitoringthe environment comprising: a sampling device, configured to collectenvironmental samples of the process areas and comprising a systemsampling pipeline, the environmental sample comprising air; an analysisdevice, connected to an output end of the system sampling pipeline andconfigured to analyze the collected environmental samples; and an airsupply device, connected to the system sampling pipeline and configuredto provide a purge gas and purge the system sampling pipeline using thepurge gas; controlling a ratio between a time period for purging thesystem sampling pipeline by using the air supply device and a timeperiod for sampling by using the sampling device to be 1:5, in a periodfor a single sampling.
 2. The monitoring method of claim 1, wherein thesampling device further comprises a plurality of single samplingpipelines; each of the process areas is connected and corresponds to oneof the single sampling pipelines, and the single sampling pipelinescorrespondingly connected to different process areas are different; thesampling device further comprises a sampling valve, configured toconnect or disconnect the single sampling pipelines and the systemsampling pipeline; the monitoring method further comprises: controllingthe sampling valve to connect one of the single sampling pipelinescorresponding to a target process area to the system sampling pipeline,and disconnect the other single sampling pipelines from the systemsampling pipeline; analyzing the environmental sample collected from thetarget process area by using the analysis device.
 3. The monitoringmethod of claim 2, wherein the system for monitoring the environmentfurther comprises: a cleaning pipeline, having a first end configured tointroduce a clean dry air and a second end connected to the singlesampling pipeline, the sampling valve being further configured tocontrol the single sampling pipeline to connect to the cleaningpipeline; and an air inlet pipeline, having one end connected to thefirst end of the cleaning pipeline and other end configured to introducethe clean dry air; the monitoring method comprises: controlling a ratiobetween a time period for introducing the clean dry air through the airinlet pipeline and the time period for sampling by using the samplingdevice to be 1:5, in the period for the single sampling.
 4. Themonitoring method of claim 3, further comprising: in the period for thesingle sampling, controlling a purging for the system sampling pipelineby using the air supply device and the introducing of the clean dry airthrough the air inlet pipeline to start at the same time and stop at thesame time.
 5. The monitoring method of claim 3, wherein the system formonitoring the environment further comprises a humidification device,configured to provide a water mist, connected between the air supplydevice and the system sampling pipeline, and also connected between theair inlet pipeline and the cleaning pipeline; the monitoring methodfurther comprises: generating the water mist by the humidificationdevice to mix with the purge gas and then enter the system samplingpipeline; and cleaning the sampling valve and the single samplingpipeline through a mixture of the clean dry air and the water mist. 6.The monitoring method of claim 5, wherein the humidification devicecomprises a humidification pipeline, connected between the systemsampling pipeline and the air supply device; the monitoring methodfurther comprises: controlling the purge gas and the water mist to bemixed and transmitted to the system sampling pipeline via thehumidification pipeline.
 7. The monitoring method of claim 6, whereinthe humidification device further comprises a drying pipeline,independent of the humidification pipeline, connected between the airsupply device and the system sampling pipeline, and configured totransmit the purge gas to the system sampling pipeline; and a switchvalve, disposed on the humidification pipeline and the drying pipeline;the monitoring method further comprises: switching one of thehumidification pipeline and the drying pipeline to be connected to thesystem sampling pipeline, and the other one of the humidificationpipeline and the drying pipeline to be disconnected from the systemsampling pipeline, by using the switch valve.
 8. The monitoring methodof claim 7, wherein the analysis device is further configured to analyzea gas purged from the system sampling pipeline to the analysis device;the monitoring method further comprises: controlling, based on ananalysis result of the analysis device, the switch valve to switch oneof the drying pipeline and the humidification pipeline to be connectedto the system sampling pipeline, and the other one of the dryingpipeline and the humidification pipeline to be disconnected from thesystem sampling pipeline.
 9. The monitoring method of claim 7, furthercomprising: setting a time period for a connection between thehumidification pipeline and the system sampling pipeline, and setting atime period for a connection between the drying pipeline and the systemsampling pipeline.
 10. The monitoring method of claim 1, wherein thesampling device comprises a sampling pump, located between the systemsampling pipeline and the analysis device; the monitoring method furthercomprises: during sampling, operating the sampling pump to collect theenvironmental samples from the process areas, and transmitting thecollected environmental samples to the analysis device.
 11. A system formonitoring an environment, used for monitoring concentrations ofairborne contaminants in a plurality of process areas in a clean room,the system comprising an air supply device, a sampling device, ananalysis device, and a control device, wherein: the air supply device isconnected to a system sampling pipeline and configured to provide apurge gas and purge the system sampling pipeline by using the purge gas;the sampling device comprises the system sampling pipeline and isconfigured to collect environmental samples from the process areas, theenvironmental sample comprising air; the analysis device is connected toan output end of the system sampling pipeline and configured to analyzethe collected environmental sample; and the control device is configuredto control, in a period for a single sampling, a ratio between a timeperiod for purging the system sampling pipeline by using the air supplydevice and a time period for sampling by using the sampling device to be1:5.
 12. The system of claim 11, wherein the sampling device furthercomprises a plurality of single sampling pipelines; each of the processareas is connected and corresponds to one of the single samplingpipelines, and the single sampling pipelines correspondingly connectedto different process areas are different; the sampling device furthercomprises a sampling valve, configured to connect or disconnect thesingle sampling pipelines and the system sampling pipeline; the controldevice is further configured to control the sampling valve to connectone single sampling pipeline corresponding to a target process area tothe system sampling pipeline, and disconnect other single samplingpipelines from the system sampling pipeline; and the analysis device isfurther configured to analyze the environmental sample collected fromthe target process area.
 13. The system of claim 12, wherein the systemfurther comprises a cleaning pipeline, having a first end configured tointroduce a clean dry air and a second end connected to the singlesampling pipeline, the sampling valve being further configured tocontrol the single sampling pipeline to connect to the cleaningpipeline; and an air inlet pipeline, having one end connected to thefirst end of the cleaning pipeline and other end configured to introducethe clean dry air; the control device is further configured to control,in the period for the single sampling, a ratio between a time period forintroducing the clean dry air through the air inlet pipeline and thetime period for sampling by using the sampling device to be 1:5.
 14. Thesystem of claim 13, wherein the control device is further configured tocontrol, in the period for the single sampling, a purging of the systemsampling pipeline and the introducing of the clean dry air through theair inlet pipeline to start at the same time and stop at the same time.15. The system of claim 14, wherein the system further comprises ahumidification device, configured to provide a water mist, connectedbetween the air supply device and the system sampling pipeline, and alsoconnected between the air inlet pipeline and the cleaning pipeline. 16.The system of claim 15, wherein the humidification device comprises ahumidification pipeline, connected between the system sampling pipelineand the air supply device; the control device is further configured tocontrol the purge gas and the water mist to be mixed and thentransmitted to the system sampling pipeline via the humidificationpipeline.
 17. The system of claim 16, wherein the humidification devicefurther comprises a drying pipeline and a switch valve, wherein thedrying pipeline is independent of the humidification pipeline, connectedbetween the air supply device and the system sampling pipeline, andconfigured to transmit the purge gas to the system sampling pipeline;and the switch valve is disposed on the humidification pipeline and thedrying pipeline; the analysis device is further configured to analyze agas purged from the system sampling pipeline to the analysis device; thesystem further comprises a first processing module, configured tocontrol, based on an analysis result of the analysis device, the switchvalve to switch one of the drying pipeline and the humidificationpipeline to be connected to the system sampling pipeline, and the otherone of the drying pipeline and the humidification pipeline to bedisconnected from the system sampling pipeline.
 18. The system of claim17, wherein the humidification device further comprises a timing module,configured to set a time period for a connection between thehumidification pipeline and the system sampling pipeline, and to set atime period for a connection between the drying pipeline and the systemsampling pipeline.
 19. The system of claim 18, wherein the samplingdevice further comprises a sampling pump, located between the systemsampling pipeline and the analysis device, and configured to collect theenvironmental samples from the process areas and transmit the collectedenvironmental samples to the analysis device; the control device isconfigured to control an operation of the sampling pump during sampling.20. The system of claim 19, wherein the system further comprises ahumidity sensor and a second processing module, wherein the humiditysensor is disposed on a port of the system sampling pipeline facing thehumidification device and configured to detect a humidity of the purgegas of the system sampling pipeline; and the second processing module isconfigured to adjust, according to the humidity displayed by thehumidity sensor, an amount of the water mist provided by thehumidification device.